LCSEM Model:MIRA VP600    Country of Origin and Manufacturers: Germany/ELLCIE

Technical specifications:

     Electron Optics and SEM Electronics:

Zeiss EVO10. Resolution in HV mode is 10nm at 30keV, 10mmWD (HV-SE detector)

     Detectors: HV-SE, VP-SE, 4-quadrant BE detector for HV and VP

     Analytics: EDX system Quantax 400 ( Bruker nano)

     Chamber size: 1300 mm Height ×1200 mm Width×1400 mm Depth

     Positioning system: 5+1 axis system with microstepping control

     Positioning range:

X-axis 600mm   Z-axis 600mm

A-axis ±40？    B-axis +120？-15？

C-axis 360？    D-axis 190？

     Sample size:    Max. 600mm in diameter, Max. 700mm in height.

     Sample weight:  Max. 300kg  

Scanning electron microscopy(SEM) is one of the most powerful tools in many technological fields, such as materials science, mechanical engineering and failure analysis, etc. However, the size of the objects that can be examined is limited by the compact chamber size of conventional microscopy. Different from the conventional SEM, the LCSEM have a extra large chamber to overcome this limitation. Component with large size could be observed in LCSEM directly without any cutting or destroy. The local chemical composition of these large component could also be analysised with the EDS. So, the LCSEM is very suitable for monitoring the damage evolution of large-sized and complex shaped structural components during their service life, as well as conducting failure analysis of such components. In the low vacuum mode(VP mode), low or non-conductive samples could also be examined in this microscopy. This means that the LCSEM can be used for non-destructive testing and identification of large samples in fields such as archaeology. With the add of loading instruments, the in-situ mechanical testing could be conducted in LCSEM to investigate the mechanism of deformation or damage.